• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A magnetron system comprising a hollow target and a magnetic system disposed in the hollow target and comprising a magnet support and a magnet arrangement applied to the magnet support, the magnet support comprising at least two magnet support elements which respectively have at least one cavity and respectively at least one contact surface on the outer side, said at least two magnet support elements touching each other by their contact surfaces and being firmly connected to each other. to one another and the cavities of the magnet support members having no connection to each other.
    公开号:BE1020306A3
    申请号:E2011/0730
    申请日:2011-12-21
    公开日:2013-07-02
    发明作者:Hans-Juergen Heinrich；Rolf Rank；Harald Grune
    申请人:Ardenne Anlagentech Gmbh；
    IPC主号:
    专利说明:

    The invention relates to a magnetron system with a hollow target.
    In coating facilities, magnetron systems with hollow targets are used to increase the target material yield and to reduce coating costs. The hollow target is mounted on one or both sides on one or two retainers, the mountable being such that the hollow target is rotatable. A magnetic system whose magnetic field has the effect of keeping the electrons close to the surface of the target is disposed in the hollow target of such magnetron systems. A plasma is concentrated by the magnetic field in the zone of strong intensity of the magnetic field. Negative cathode voltage applied to the target results in ion bombardment by process gas ions on the target surface and thus uniform removal of the target material.
    The magnetic system is constituted for example by a magnet support on which magnets are mounted. The magnetic system is arranged according to the process, for example rotatively or anti-rotatively, in the hollow target. The magnets are thus held optimally inside the hollow target and are surrounded by cooling water. The volume that is filled by the cooling water is relatively large and it forms on the inner surfaces to cool the hollow target lower flow rates with less turbulence.
    It is also known that the magnet support must be rigidly designed so that, even in the presence of long hollow targets, for example three to four meters long, the distance of the magnets from the inner surface of the hollow target remains constant so that the magnetic field is as uniform as possible on the outer side of the hollow target. If the magnetic system is made very rigid, its weight also increases. Many known magnetic systems therefore burden their high weight with the support points; resulting in major maintenance work.
    During a target change, the magnetic system must be removed from the used hollow target and inserted into the new hollow target. Sealing surfaces are on the front sides of the hollow target due to the design. These may be struck when changing the target. Magnetic systems, for example of special steel, cause damage in a collision with a sealing surface on the front side of the hollow target which may lead to future leakage of the magnetron system.
    Document US 2006/0157346 A1 discloses a magnetron device with a hollow target inside which is disposed a magnet support which is designed as an extruded double-walled aluminum tube, the inner tube being connected by six ribs to the outer tube which carries on its outer side the magnetic system.
    Document US Pat. No. 5,571,393 B discloses a magnet housing in which a magnet arrangement and a cooling fluid duct are housed in a housing, the housing being formed of two housing halves connected to one another. the other which surround a common cavity. The cooling fluid is conveyed in the cooling fluid conduit disposed in the cavity of the housing from a first end of the hollow target to a second end, is introduced therein in the space between housing and hollow target and brought back in this intermediate space to the first end of the hollow target, the inner surface of the hollow target thus being cooled. The distance of the magnets from the hollow target, however, is relatively large because the wall of the housing is between them.
    Document WO 2009/138348 A1 discloses a magnetic system in which the magnets are arranged on or in an integral support element, for example an extruded aluminum profile, which has a high flexural rigidity for a low weight. . However, support elements made of aluminum alloys in which a cooling fluid flows must be provided with a passivation layer or an elastomeric layer in order to be protected against corrosion. When this protective layer is damaged, the risk exists that the support element is attacked by corrosion. In addition, the proposed profile has a complex cross section with which are associated relatively high manufacturing costs.
    A task, therefore, is to provide a magnetron system with a magnetic system that fires with a small amount of coolant. Another task is to guide the cooling fluid so as to obtain a cooling capacity as large as possible. Another task is to provide a magnetron system with a magnet holder that is not susceptible to corrosion. Another task is to provide a magnet support system that has a high flexural rigidity for the reliable operation of the magnetron system, regardless of the mounting position. Another task is to reduce the weight of the magnetic system to unload the weights. Another task is to increase the mounting safety during the introduction and removal of the magnet support system into or out of the hollow target to prevent damage to sealing surfaces.
    This is why a magnetron system is proposed which comprises a hollow target and a magnetic system which is disposed in the hollow target and comprises a magnet support and a magnet arrangement applied to the magnet support, the magnet support and the magnet support. magnets comprising at least two magnet support members which respectively have at least one cavity and respectively at least one contact surface on the outer side, said at least two magnet support elements touching each other by their contact surfaces and being firmly connected to one another and the cavities of the magnet support members having no connection to each other.
    The proposed device consists of at least two elongate magnet support elements connected together, which respectively have at least one elongated cavity, these cavities can be used for different purposes, which will be explained in more detail below. after. The individual cavities are delimited relative to each other, that is to say that there is no interconnecting connection between them so that a dedicated use of each cavity for a specific purpose is possible. At the same time, the magnet support elements are, taken separately separately, of relatively simple construction so that their manufacture is simple and inexpensive. The magnet support members are connected to each other on contact surfaces such that a plurality of single cross sections together form a complex cross-section with high flexural rigidity for low weight.
    It can be provided that at least one cavity of a magnet support member is a cooling fluid conduit and it can be provided in an improvement that the cooling fluid conduit has cooling fluid outlets along of the magnet support element. The use of the cavity of a magnet support element as a cooling fluid conduit makes it possible to dispense with separate cooling fluid conduits, whereas the cooling fluid outlet system allows a uniform supply of cooling fluid. cooling and, therefore, efficient cooling of the hollow target.
    It can also be provided that at least one cavity of a magnet support member is filled with an expanded plastic material. The filling of the cavity of the magnet support member with an expanded plastic material contributes, on the one hand, to an increase in the bending stiffness of the magnet support and, on the other hand, prevents the penetration of cooling fluid into the cavity in case a leakage should occur.
    In another embodiment, it is provided that the magnet arrangement is disposed in at least one cavity of a magnet support member. Alternatively, the magnet arrangement may be disposed on the outer side of a magnet support member. By placing the magnet arrangement in a cavity which is closed with respect to other cavities guiding, for example, cooling fluid, the magnet arrangement is well protected against corrosion. On the other hand, it can be obtained by placing the arrangement of magnets on the outer side of a magnet support element that the intensity of the magnetic field is only minimally weakened on the outer side of the hollow target and that the magnet arrangement itself is optimally cooled. For this purpose, the magnet arrangement may be provided for example with a corrosion protection coating.
    The magnet support member may have, for example, a recess in an outer surface that receives the magnet arrangement and partially encloses the magnet arrangement when the recess is suitably designed. A recess must define a partial surface of the outer surface of a magnet support member that represents a depression seen from the outside. In another embodiment, such a recess which receives the magnet arrangement may be formed by two or more adjacent magnet support members, as will be explained in even more detail particularly on the basis of examples of realization.
    Another embodiment provides that at least one magnet support member is made of a fiber reinforced material. Although, in general, reservations are made regarding the use of plastics in magnetron systems, it has surprisingly proved that they can be used with good results when effective cooling takes place. is assured and that plastics that are not attacked by the cooling fluid used are used. Fiber-reinforced materials, for example, polyester, vinyl ester, epoxy or acrylic resins with glass, carbon or Kevlar aramid reinforcing fibers have been found particularly suitable for this purpose.
    In another embodiment, the magnet support members are glued together on their contact surfaces. Particularly in the case of bonding the magnet support elements to the entirety of their contact surfaces, this results in a large increase in the bending stiffness of a magnet support composed of two or more than two elements. magnet support. The magnet support elements may also, in addition or alternatively, be connected to each other by screws, rivets or similar means. These similar means may comprise, for example, form-complementary connecting elements which are arranged on the contact surfaces, that is to say on the outer sides of the magnet support elements, and can be connected to each other. to each other. Likewise, the magnet support members may also, in addition or alternatively, be connected to each other by clamps or clamping bands which externally surround the magnet support members.
    It can also be provided that the contact surfaces of the magnet support members have recesses which form another cavity. The notion of a recess is also to be understood here in the sense explained above. The recesses of the outer surfaces facing each other of two or more magnet support members therefore form an elongated cavity which lies between the two or more magnet support members and therefore does not present no connection with a cavity of a magnet support member.
    A bar-shaped stiffening element for example may be disposed in this other cavity. Such a bar-shaped stiffening element may for example be a bar with a cross section, for example round or rectangular. This stiffening element may also have, in another embodiment, an elongated cavity, for example for guiding the cooling fluid or for receiving an electric cable.
    Exemplary embodiments of the magnet holders described will be explained in more detail below based on figures. For this purpose, lafig. 1 shows, in cross section, a magnetron system having two magnet support members without recessing the contact surfaces, FIG. 2 shows, in cross section, a magnetron system having three magnet support members which have recesses of the contact surfaces, which form a cavity, FIG. 3 shows, in cross-section, a magnetron system comprising two magnet support elements, which .....
    have recesses of the contact surfaces, which form a cavity in which is disposed a stiffening element, lafig. 4 shows, in cross section, a magnetron system having two magnet support members which have recesses of the contact surfaces, which form a cavity.
    A cylindrical hollow target 1 in which a layer of target material 12 is disposed on the outer side of a support structure 11 is shown in cross section in all the exemplary embodiments.
    Inside the hollow target 1 is a magnet holder 3 which comprises two or more magnetically attached magnet support members 31 connected to each other on contact surfaces 34. On the outer side of the magnet holder 3 is attached a magnet arrangement 2 which includes a magnet carrier 21 and a plurality of magnets 22 so that the magnets 22 are disposed near the inner surface of the hollow target. 1. The magnet carrier 21 of the exemplary embodiments is purely optional; it goes without saying that the magnets can also be applied directly to a magnet support element.
    Fig. 1 represents an exemplary embodiment in which two magnet support elements 31 respectively have a planar contact surface by which the magnet support elements 31 touch and are connected to each other, for example by gluing . Each magnet support member 31 has a cavity 32 which is separated from the cavity 32 of the other magnet support member 31 and which may be used as a coolant conduit, housing for power lines or the like. These cavities 32 may further be filled with an expanded plastic material.
    In the exemplary embodiment shown, the separation plane runs horizontally between the two magnet support elements 31 and the magnet arrangement 2 which comprises a magnet carrier 21 and magnets 22 is fixed on that of the two elements magnets support that is above. For this purpose, the magnet support member 31 has a reinforcement 33 in which the magnet arrangement 2 is retained. The upper magnet support member 31 in the selected representation further has a plurality of coolant outlets 37 which provide with the coolant outlets 23 of the magnet carrier 21 arranged in a corresponding manner that the fluid guided cooling in the cavity 32 is provided over the entire length of the hollow target 1 in the magnets region 22 inside the hollow target 1.
    Fig. 2 shows an exemplary embodiment in which the magnet support 3 comprises three magnet support members 31 which respectively have two contact surfaces 34 by which they are connected with a neighboring magnet support element 31. These contact surfaces have depressions 35 through which a central cavity 36 is formed between the magnet support members 31, which may also serve as a coolant conduit or for similar purposes.
    The magnet arrangement which again comprises a magnet carrier 21 and magnets 22 applied thereto is retained by two adjacent magnet support members 31 which respectively have on their outer sides a recess 33. These two recesses 33 act together as a housing for the arrangement of magnets 2.
    In the embodiment according to FIG. 3, two magnet support members 31 are connected to one another on contact surfaces 34 so that the separation plane in the chosen representation extends vertically and the magnet arrangement is again held in two recesses 33 cooperating on the outer sides of the two magnet support members 31.
    The surfaces of. contact 34 of the two magnet support members 31 each have a recess 35, which together form a cavity 36 of rectangular cross section disposed centrally. A bar-shaped stiffening element 4 having a corresponding rectangular cross-section is disposed in this cavity 36. It is a rectangular hollow profile which may also serve as a coolant conduit or for similar purposes.
    The magnet support 3 similarly comprises, in the exemplary embodiment according to FIG. 4, two magnet support members 31 whose contact surfaces 34 in the chosen representation form a vertical separation plane. The magnet arrangement is also retained in two co-operating recesses 33 on the outer sides of the two magnet support members 31.
    The recesses 35 of the contact surfaces 34 together form a cavity 36 with a round cross-section in which, however, there is no stiffening element in this embodiment.
    List of part numbers 1 Hollow target 11 Support structure 12 Target material 2 Magnet arrangement 21 Magnet holder 22 Magnet 23 Coolant outlet 3 Magnet holder 31 Magnet support element 32 Cavity 33 Recess for arrangement of magnets 34 Contact surface 35 Recess of contact surface 36 Cavity 37 Coolant outlet 4 Stirring element
    权利要求:
    Claims (10)
    [1]
    A magnetron system comprising a hollow target (1) and a magnetic system which is disposed in the hollow target (1) and comprises a magnet support (3) and a magnet arrangement (2) applied to the support of magnets (3), the magnet support (3) comprising at least two magnet support elements (31) which respectively have at least one cavity (32) and respectively at least one contact surface (34) on the side exterior, said at least two magnet support members (31) touching each other by their contact surfaces (34) and being firmly connected to each other and the cavities (32) of the magnet support members ( 31) having no connection with each other.
    [2]
    Magnetron system according to claim 1, characterized in that at least one cavity (32) of a magnet support element (31) is a cooling fluid conduit.
    [3]
    Magnetron system according to claim 2, characterized in that the cooling medium duct has cooling fluid outlets (37) along the magnet support element (31).
    [4]
    4. Magnetron system according to any one of claims 1 to 3, characterized in that at least one cavity (32) of a magnet support member (31) is filled with a plastic-expanded.
    [5]
    Magnetron system according to one of Claims 1 to 4, characterized in that the magnet arrangement (2) is arranged in at least one cavity (32) of a magnet support element (31). .
    [6]
    Magnetron system according to one of Claims 1 to 4, characterized in that the magnet arrangement (2) is arranged on the outer side of a magnet support element (31).
    [7]
    7. Magnetron system according to any one of claims 1 to 6, characterized in that at least one magnet support member (31) is made of a fiber-reinforced material.
    [8]
    Magnetron system according to one of Claims 1 to 7, characterized in that the magnet support elements (31) are glued to each other on their contact surfaces (34).
    [9]
    Magnetron system according to one of Claims 1 to 8, characterized in that the contact surfaces (34) of the magnet support elements (31) have recesses (35) forming another cavity (36). .
    [10]
    10. magnetron system according to claim 9, characterized in that a reinforcing element (4) in the form of bar is disposed in the other cavity (36).
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    同族专利:
    公开号 | 公开日
    DE102010063685B4|2012-07-12|
    DE102010063685A1|2012-06-21|
    US20120152738A1|2012-06-21|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
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    US20060157346A1|2003-07-04|2006-07-20|Dirk Cnockaert|Rotating tubular sputter target assembly|
    WO2009138348A1|2008-05-16|2009-11-19|Bekaert Advanced Coatings|A rotatable sputtering magnetron with high stiffness|
    US2910730A|1956-07-05|1959-11-03|Pittsburgh Plate Glass Co|Filling elongated cavities with polyurethane foams|
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    BE1021020B1|2013-04-12|2014-12-19|Soleras Advanced Coatings Bvba|HYBRID MAGNET WEAR STRUCTURE|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102010063685|2010-02-21|
    DE102010063685A|DE102010063685B4|2010-02-21|2010-02-21|Magnetron arrangement with a hollow target|
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